CAS 352535-01-4 | TETRAKIS(ETHYLMETHYLAMINO)HAFNIUM

Products Description

Tetrakis(ethylmethylamino)hafnium(IV) is an organometallic compound. It is a colorless to pale yellow solid that is soluble in organic solvents such as toluene and ethyl acetate. It is stable in air but decomposes when exposed to moisture. It has high thermal stability and low toxicity.
Tetrakis(ethylmethylamino)hafnium can be prepared by reacting ethylmethylamine directly with alane in the presence of hafnium tetrachloride. A purification step is required after the reaction, for example by vacuum distillation.

Basic Info

Uses

Tetrakis(ethylmethylamino)hafnium(IV) is mainly used in chemical vapor deposition (CVD) or atomic layer deposition (ALD) processes to grow hafnium nitride or hafnium oxide. This compound is a key raw material in these processes and is of great significance for the preparation of high-quality thin film materials.

Company Profile

Gneechem, located in Henan Province, China, is part of the GNEE Group, with 22 years of experience in foreign trade, specializing in providing high-quality chemical raw materials and professional trading services to customers around the world. We supply basic chemical raw materials, fine chemicals and specialty chemicals for a wide range of industries.We are ISO9001 certified and have been recognized by a number of authoritative qualifications at home and abroad, making us a trusted partner of our customers.

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