CAS 13801-49-5| TETRAKIS(DIETHYLAMINO)ZIRCONIUM

Products Description

CAS 13801-49-5 is a chemical substance with the chemical name Tetrakis(Diethylamino)Zirconium, also known as TDEAZ‌‌12. It is a pale yellow liquid with a density of 1.026 g/mL (25°C).
ETRAKIS(DIETHYLAMINO)ZIRCONIUM is highly flammable and extremely sensitive to water. It reacts violently with water and releases flammable gases. It is an irritant and may cause damage to the eyes, respiratory system and skin, so appropriate protective clothing, gloves and goggles are required when handling it.

Basic Info

Uses

‌Chemical Vapor Deposition (CVD) and Atomic Layer Deposition (ALD): Tetrakis(Diethylamino)Zirconium is used as a zirconium source material in these processes to prepare zirconium-based films.

These films are widely used in semiconductor manufacturing, microelectronics, and optoelectronics. ‌Logic devices and nano-coatings: Its films are also used in these fields, including but not limited to logic devices and nano-coatings.

Company Profile

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