CAS:64916-48-9 | Palladium(II) Hexafluoroacetylacetonate

The compound corresponding to CAS 64916-48-9 is Palladium(II) Hexafluoroacetylacetonate, which is a metal organic compound. Its molecular formula is C₁₀H₂F₁₂O₄Pd, molecular weight is 520.52 g/mol, and its chemical structure contains two hexafluoroacetylacetone ligands coordinated to the palladium (II) center.
Palladium(II) Hexafluoroacetylacetonate appears as a yellow crystalline powder, which is stable under normal conditions, but should be avoided from contact with strong oxidants. As a metal organic precursor, it is soluble in a variety of organic solvents and is commonly used in semiconductor manufacturing and catalytic reactions.

Palladium(II) Hexafluoroacetylacetonate is used in the semiconductor industry as a MOCVD (metal organic chemical vapor deposition) precursor for copper chemical vapor deposition processes to optimize metal alloying in ultra-large-scale integrated devices. In addition, it can also be used as a homogeneous catalyst to participate in redox reactions and metal replacement reactions.

Palladium(II) Hexafluoroacetylacetonate is an irritant (hazard code Xi) and may cause irritation to the skin, eyes and respiratory tract. Specific hazards include:
H315: causes skin irritation;
H319: causes serious eye irritation;
H335: may cause respiratory irritation.
Wear protective glasses, gloves and protective clothing during operation to avoid direct contact or inhalation of dust. Store in a cool and dry place, away from fire and oxidants.

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